About Us
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Technology: |
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Proprietary development of core technologies is at the root of our product’s
unprecedented high performance and value to our customers and business partners.
Our products are designed using the latest simulation and design verification
techniques as well as reliability growth models and fault tree analysis. Our
technology and capability make IE a key supplier of industry leaders.
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Products: |
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Innovation Energy offers a robust combination of VHF power supplies, impedance
matching networks and consulting services.
Our SunLight™ line of power supplies is a VHF platform available in 27 MHz, 40
MHz, 60 MHz, and 80 MHz frequencies and custom models operating at frequencies
greater than 150 MHz. SunLight™ VHF power supplies are available in multiple
configurations and power levels up to 20 kW. The SunLight™ VHF power supply
portfolio is the enabling technology for the next generation of VHF based plasma
processing.
Our Velocity™ line of impedance matching networks is a 100% solid state design
based upon our patented electronic variable capacitor (EVC) technology. The
Velocity™ is available in several VHF frequencies and power level combinations
as well the more traditional 400kHz, 2 MHz and 13 MHz frequency range. The Velocity™
line of impedance matching networks offer cost effective solutions where
critical matching network performance is required for process advancement.
Our consulting service is directed towards introducing VHF delivery systems in
place of more traditional, lower frequency, RF power delivery systems.
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Applications: |
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Innovation Energy is focused on serving the semiconductor, laser and solar
photovoltaic manufacturing market.
Etching semiconductor materials has become an ultra critical manufacturing step.
The key to successful processing of critical semiconductor materials often
includes a VHF based plasma. In less than 10 years, VHF has become the standard
frequency for the majority of critical plasma processing and Innovation Energy
is proud to lead the way the latest technology available.
Deposition of high quality amorphous and microcrystalline using VHF power
delivery systems is the next step toward viable solar energy. High quality thin
films, along with high deposition rates, are the key for silicon based thin
films. VHF power is a key technology for these high performance films.
The laser market demands a unique combination of high power and control.
Innovation Energy’s high power supplies are an ideal match for this industrial
application. Our small footprint and solid state amplifier design is a
generation beyond our competitors large, high maintenance vacuum tube based
power supplies.
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